The semiconductor and packaging testing industry relies on ultra-clean surfaces to ensure bonding strength and device stability, และ In-line Plasma Cleaning Machine is a pivotal process tool. It integrates seamlessly into production lines, resolving pain points like residual contaminants, weak interface bonding, and low process compatibility.
Wire Bonding Pre-Treatment: Enhancing Bond Strength & Durability
ประการแรก, wire bonding is a critical packaging step vulnerable to pad oxidation and organic residues. The In-line Plasma Cleaning Machine uses Ar/O₂ mixed gas (ratio 7:3) to remove contaminants without damaging aluminum pads or lead frames.
นอกจากนี้, it operates at 180-250W power and 5-10Pa vacuum, treating surfaces in 3-5 minutes to boost wire pull force. ตัวอย่างเช่น, a packaging factory used it for QFN lead frame cleaning, increasing wire pull force from 15N to 25N and reducing interface fractures. นอกจากนี้, it activates surface functional groups, ensuring consistent bonding quality across high-volume production.
Wafer Bonding Activation: Optimizing Heterogeneous Integration
Wafer-to-wafer or die-to-wafer bonding requires high surface activity to avoid interface voids. The In-line Plasma Cleaning Machine delivers precise surface activation for silicon, กระจก, and compound semiconductors.
นอกจากนี้, it uses tailored gas mixtures—Ar/O₂ for silicon activation and NH₃ for III-V compounds—to improve bonding energy. Besides, it supports low-temperature processing (<150℃), ideal for heat-sensitive devices. This solution helped a lab optimize 12-inch silicon bonding, cutting interface void rate from 15% to 0.3% and reducing heat treatment temperature by 700℃.
Flip Chip Underfill Preparation: Preventing Delamination
ประการที่สอง, flip chip packaging needs clean, activated surfaces to ensure underfill adhesion and void-free filling. The In-line Plasma Cleaning Machine removes flux residues and oxide layers from chip and substrate gaps.
นอกจากนี้, it enhances surface wettability (water contact angle <10°) to accelerate underfill capillary flow. For instance, an advanced packaging plant used it to treat flip chip surfaces, reducing underfill voids by 90% and improving thermal cycling reliability. Consequently, it helps pass MSL (Moisture Sensitivity Level) testing with ease.
BGA/Solder Ball Mounting Pre-Cleaning: Boosting Solderability
BGA substrate and solder ball mounting suffer from pad oxidation, leading to poor solder wetting. The In-line Plasma Cleaning Machine uses O₂ or O₂/N₂ mixed gas to clean and roughen BGA pads.
นอกจากนี้, it operates at 220W power and 12Pa vacuum, treating pads in 8 minutes to improve solder joint integrity. นอกจากนี้, it integrates with post-treatment inspection, ensuring pad surface energy meets soldering requirements. A semiconductor factory used it to optimize BGA mounting, increasing first-pass yield by 35% and reducing rework costs.
MEMS Packaging: Ensuring Hermeticity & Performance
ในที่สุด, MEMS devices require strict hermeticity and surface cleanliness to maintain sensing accuracy. The In-line Plasma Cleaning Machine uses a two-step process (Ar sputtering + O₂ activation) for silicon-glass anodic bonding.
Besides, it reduces bonding voltage from 1000V to 200V, cutting energy consumption by 80% while improving leak tightness. นอกจากนี้, it removes micro-particles and organic residues, lowering MEMS device leakage current from 10⁻⁷A to 10⁻¹²A. ตัวอย่างเช่น, a MEMS manufacturer used it to enhance sensor reliability, extending service life by 3x.
ค่านิยมหลัก: Integrated Precision for Advanced Packaging
The In-line Plasma Cleaning Machine combines atomic-level cleaning, surface activation, and in-line compatibility. It adapts to diverse packaging processes—wire bonding, wafer bonding, flip chip, and MEMS—with tailored gas and parameter settings.
Compared to offline cleaning, it eliminates process interruptions and ensures consistent batch quality. Ultimately, it is not just a cleaning tool but a solution that drives advanced semiconductor packaging toward higher reliability and efficiency.
บริษัท เจทรอน อินสทรูเมนท์ส จำกัด, จำกัด. มีความเชี่ยวชาญในด้านการวัดทางอิเล็กทรอนิกส์สำหรับ 35 ปี, ครอบคลุมความต้องการการวัดที่หลากหลายทั่วทั้งห่วงโซ่อุตสาหกรรมอิเล็กทรอนิกส์ และให้การสนับสนุนการวัดที่แม่นยำ.
